Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition

Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition
Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition
Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition

Key features

  • •The semiconductor industry
  • •Properties of semiconductor materials and chemicals
  • •Crystal growth and silicon wafer preparation
  • •Wafer fabrication and packaging
  • •Contamination control
  • •Productivity and process yields
  • •Oxidation
  • •The ten-step patterning process--surface preparation to exposure; developing to final inspection
  • •Next generation lithography
  • •Doping
  • •Layer deposition
  • •Metallization
  • •Process and device evaluation
  • •The business of wafer fabrication
  • •Devices and integrated circuit formation
  • •Integrated circuits
  • •Packaging

Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition

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