Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition
Key features
- •The semiconductor industry
- •Properties of semiconductor materials and chemicals
- •Crystal growth and silicon wafer preparation
- •Wafer fabrication and packaging
- •Contamination control
- •Productivity and process yields
- •Oxidation
- •The ten-step patterning process--surface preparation to exposure; developing to final inspection
- •Next generation lithography
- •Doping
- •Layer deposition
- •Metallization
- •Process and device evaluation
- •The business of wafer fabrication
- •Devices and integrated circuit formation
- •Integrated circuits
- •Packaging
CategoryIntegrated
Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition
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